The FS1012 comprise a MEMS flow sensor mounted on a circuit board with a flow housing. It features a 6-pin standard header connected directly to the MEMS flow sensor.

The FS1012 is capable of measuring a non-corrosive gas or liquid medium. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio and is ideal for applications requiring low power. It is highly sensitive at low flow rates with a very fast response time.

The set of upstream and downstream thermopiles can be used independently in a single-ended circuit or connected together in a differential configuration.

Features

  • Measures gas or liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Low power application
  • Fast response time
  • Millivolt output
  • Heater supply voltage: 3V to 5V DC
  • Operating temperature range: 0°C to +85°C

Product Options

下单器件 ID Part Status 描述 Pkg. Code Temp. Range Buy Sample
FS1012-1001-LQ Active Liquid, 0 to 0.5 SLPM MOD1 0 to 85°C
Availability
FS1012-1002-LQ Active Liquid, 0 to 1.0 SLPM MOD1 0 to 85°C
Availability
FS1012-1020-NG Active Gas, 0 to 2 SLPM MOD1 0 to 85°C
Availability
FS1012-1100-NG Active Gas, 0 to 10 SLPM MOD1 0 to 85°C
Availability

技术资料

文档标题 他の言語 文档类型 文档格式 文件大小
数据手册与勘误表
FS1012 Datasheet Datasheet PDF 272 KB
应用指南 &白皮书
Whitepaper - MEMS Mass Flow Sensor White Paper PDF 347 KB
其它
Sensing Technologies and Sensor Solutions Overview ( 简体中文) English Overview PDF 1.66 MB
FS10xx/FS2012 High-Performance MEMS Flow Sensor Module Family Product Brief PDF 236 KB

Evaluation Boards

Part Number Title 升序排列
SDAWIR Wireless Flow Rate, Humidity, and Temperature Sensing Evaluation Kit
SDAF0x Mass Flow Sensor Evaluation Kit